Ua hoʻomohala ʻia kahi ʻenehana hou no ka hana ʻana i nā semiconductors nanometer ma USA

ʻAʻole hiki ke noʻonoʻo i ka hoʻomohala hou ʻana o ka microelectronics me ka ʻole o ka hoʻomaikaʻi ʻana i nā ʻenehana hana semiconductor. No ka hoʻonui ʻana i nā palena a aʻo i ka hana ʻana i nā mea liʻiliʻi ma luna o nā kristal, pono nā ʻenehana hou a me nā mea hana hou. Hiki i kekahi o kēia mau ʻenehana ke hoʻomohala ʻia e nā ʻepekema ʻAmelika.

He hui o nā mea noiʻi mai ka US Department of Energy's Argonne National Laboratory ua hoʻomohala he ʻenehana hou no ka hana ʻana a me ke kālai ʻana i nā kiʻiʻoniʻoni lahilahi ma ka ʻili o nā kristal. Hiki i kēia ke alakaʻi i ka hana ʻana i nā chips ma kahi liʻiliʻi ma mua o kēia lā a i ka wā e hiki mai ana. Ua paʻi ʻia ke aʻo ʻana ma ka puke pai Chemistry of Materials.

Ua like ka ʻenehana i manaʻo ʻia me ka hana kuʻuna ka waiho ʻana o ka papa atomika a me ka etching, ma kahi o nā kiʻiʻoniʻoni ʻole, hana ka ʻenehana hou a hana pū me nā kiʻiʻoniʻoni organik. ʻOiaʻiʻo, ma ka hoʻohālikelike, ua kapa ʻia ka ʻenehana hou i ka molecular layer deposition (MLD, molecular layer deposition) a me ka molecular layer etching (MLE, molecular layer etching).

E like me ke ʻano o ka etching layer atomic, hoʻohana ke ʻano MLE i ka mālama kinoea i loko o kahi keʻena o ka ʻili o kahi aniani me nā kiʻiʻoniʻoni o kahi mea i hoʻokumu ʻia. Hoʻohana ʻia ke aniani me nā kinoea ʻokoʻa ʻelua a hiki i ka lahilahi o ke kiʻiʻoniʻoni i ka mānoanoa.

Aia nā kaʻina hana kemika i nā kānāwai o ka hoʻoponopono ponoʻī. ʻO ia ke ʻano o ka wehe ʻia ʻana o ka papa ma hope o ka papa a me ke ʻano kaohi. Inā hoʻohana ʻoe i nā photomasks, hiki iā ʻoe ke hana hou i ka topology o ka chip e hiki mai ana ma ka chip a etch i ka hoʻolālā me ka pololei loa.

I loko o ka hoʻokolohua, ua hoʻohana nā ʻepekema i ke kinoea i loko o nā paʻakai lithium a me kahi kinoea i hoʻokumu ʻia ma ka trimethylaluminum no ka etching molecular. I ka wā o ke kaʻina hana etching, ua hana ka lithium compound me ka ʻili o ke kiʻi alucone ma ke ʻano i waiho ʻia ai ka lithium ma ka ʻili a hoʻopau i ka paʻa kemika i loko o ke kiʻi. A laila ua hoʻolakoʻia ka trimethylaluminum, kahi i wehe ai i ka papa o ke kiʻi me ka lithium, a pēlā aku i kēlā me kēia a hiki i ka emiʻana o ke kiʻi i ka mānoanoa i makemakeʻia. ʻO ka mana maikaʻi o ke kaʻina hana, manaʻo ka poʻe ʻepekema, hiki ke ʻae i ka ʻenehana i manaʻo ʻia e pana i ka hoʻomohala ʻana o ka hana semiconductor.

Source: 3dnews.ru