Fabkis tau nthuav tawm xya-theem GAA transistor ntawm tag kis

Tau ntev tsis yog zais cia, uas los ntawm 3nm txheej txheem thev naus laus zis, transistors yuav txav los ntawm ntsug "fin" FinFET raws mus rau kab rov tav nanopage channel tag nrho ncig ntawm rooj vag lossis GAA (qhov rooj-tag nrho-ncig). Niaj hnub no, Fabkis lub koom haum CEA-Leti tau qhia yuav ua li cas FinFET transistor manufacturing txheej txheem tuaj yeem siv los tsim ntau theem GAA transistors. Thiab tswj kev txuas ntxiv ntawm cov txheej txheem thev naus laus zis yog lub hauv paus txhim khu kev qha rau kev hloov pauv sai.

CEA-Leti cov kws tshaj lij rau VLSI Technology & Circuits 2020 symposium npaj ib daim ntawv qhia hais txog kev tsim tawm xya-theem GAA transistor (tshwj xeeb ua tsaug rau tus kabmob coronavirus, ua tsaug rau cov ntaub ntawv ntawm kev nthuav qhia thaum kawg pib tshwm sim sai, thiab tsis yog lub hlis tom qab lub rooj sib tham). Cov kws tshawb fawb Fabkis tau ua pov thawj tias lawv tuaj yeem tsim GAA transistors nrog cov channel nyob rau hauv daim ntawv ntawm tag nrho "pawg" ntawm nanopages siv cov cuab yeej siv dav dav ntawm cov txheej txheem RMG (hloov lub rooj vag hlau lossis hauv Lavxias, hloov pauv (ib ntus) hlau) rooj vag). Nyob rau tib lub sijhawm, RMG cov txheej txheem kev ua haujlwm tau hloov kho rau kev tsim cov FinFET transistors thiab, raws li peb pom, tuaj yeem txuas ntxiv mus rau kev tsim cov GAA transistors nrog ntau theem ntawm nanopage channels.

Samsung, raws li peb paub, nrog rau kev pib ntawm kev tsim tawm ntawm 3-nm chips, npaj yuav tsim ob-theem GAA transistors nrog ob lub tiaj tiaj (nanopages) nyob ib sab saum toj ib sab, ncig ntawm txhua sab los ntawm lub rooj vag. CEA-Leti cov kws tshaj lij tau pom tias nws muaj peev xwm tsim cov transistors nrog xya nanopage channel thiab tib lub sijhawm teem cov channel rau qhov dav dav. Piv txwv li, ib qho kev sim GAA transistor nrog xya channel tau tso tawm hauv cov qauv nrog qhov dav ntawm 15 nm txog 85 nm. Nws yog qhov tseeb tias qhov no tso cai rau koj los teeb tsa cov yam ntxwv ntawm cov transistors thiab lav lawv cov kev rov ua dua tshiab (txo qis kev sib kis).

Raws li Fab Kis, ntau theem channel hauv GAA transistor, qhov dav dav ntawm tag nrho cov channel thiab, yog li ntawd, kev tswj tau zoo dua ntawm transistor. Tsis tas li ntawd, nyob rau hauv ib tug multilayer qauv muaj tsawg to tam sim no. Piv txwv li, xya-theem GAA transistor muaj peb zaug tsawg dua tam sim no dua li ob-theem ib qho (zoo li Samsung GAA). Zoo, kev lag luam thaum kawg tau pom txoj hauv kev, txav deb ntawm kab rov tav tso ntawm cov ntsiab lus ntawm lub nti mus rau ntsug. Nws zoo nkaus li tias microcircuits yuav tsis tas yuav nce thaj tsam ntawm cov muaju kom thiaj li ua tau sai dua, muaj zog dua thiab muaj zog.

Tau qhov twg los: 3d xov.ru