Nws tsis yooj yim sua kom xav txog kev txhim kho ntxiv ntawm microelectronics yam tsis tau txhim kho cov khoom siv hluav taws xob semiconductor. Txhawm rau nthuav cov ciam teb thiab kawm yuav ua li cas tsim cov khoom me me ntawm cov muaju, cov thev naus laus zis tshiab thiab cov cuab yeej tshiab yog xav tau. Ib qho ntawm cov thev naus laus zis no tuaj yeem yog kev txhim kho los ntawm Asmeskas cov kws tshawb fawb.
Ib pab neeg tshawb fawb los ntawm US Department of Energy's Argonne National Laboratory ib tug txheej txheem tshiab rau tsim thiab etching nyias zaj duab xis nyob rau saum npoo ntawm crystals. Qhov no tuaj yeem ua rau muaj kev tsim cov chips ntawm me me dua li niaj hnub no thiab yav tom ntej. Txoj kev tshawb no tau luam tawm nyob rau hauv phau ntawv Journal Chemistry of Materials.
Cov txheej txheem npaj zoo li cov txheej txheem ib txwm ua thiab etching, tsuas yog es tsis txhob ntawm cov yeeb yaj kiab inorganic, cov thev naus laus zis tshiab tsim thiab ua haujlwm nrog cov yeeb yaj kiab organic. Qhov tseeb, los ntawm kev sib piv, cov thev naus laus zis tshiab hu ua molecular layer deposition (MLD, molecular layer deposition) thiab molecular layer etching (MLE, molecular layer etching).
Raws li nyob rau hauv cov ntaub ntawv ntawm atomic txheej etching, MLE txoj kev siv roj kev kho mob nyob rau hauv ib tug chamber ntawm lub nto ntawm ib tug siv lead ua nrog films ntawm ib tug organic-raws li cov ntaub ntawv. Cov siv lead ua yog cyclically kho nrog ob lub roj sib txawv ua ke kom txog thaum cov yeeb yaj kiab yog thinned mus rau ib qho tuab tuab.
Cov txheej txheem tshuaj yog ua raws li cov cai ntawm kev tswj tus kheej. Qhov no txhais tau hais tias txheej tom qab txheej raug tshem tawm tusyees thiab tswj tau. Yog tias koj siv photomasks, koj tuaj yeem tsim cov topology ntawm lub neej yav tom ntej ntawm lub nti thiab kos cov qauv tsim nrog qhov tseeb tshaj plaws.
Hauv kev sim, cov kws tshawb fawb tau siv cov roj uas muaj lithium ntsev thiab roj raws li trimethylaluminium rau molecular etching. Thaum lub sij hawm etching txheej txheem, cov lithium compound reacted nrog rau saum npoo ntawm alucone zaj duab xis nyob rau hauv xws li ib tug txoj kev uas lithium tau tso rau ntawm qhov chaw thiab rhuav tshem cov tshuaj daim ntawv cog lus nyob rau hauv zaj duab xis. Tom qab ntawd trimethylaluminium tau muab, uas tshem tawm cov txheej txheem ntawm cov yeeb yaj kiab nrog lithium, thiab yog li ntawm ib qho los ntawm ib qho kom txog thaum cov yeeb yaj kiab raug txo mus rau qhov xav tau tuab. Kev tswj tau zoo ntawm cov txheej txheem, cov kws tshawb fawb ntseeg tias, tuaj yeem tso cai rau cov thev naus laus zis los thawb kev tsim cov khoom siv semiconductor.
Tau qhov twg los: 3d xov.ru