Laa azụ na Mee, ASML, onye ndu na ngalaba nyocha nke lithography, kwuru banyere atụmanya maka mpụta site na mmalite nke afọ iri na-abịanụ nke na-enye ohere iji ọnụ ahịa ọnụọgụ ọnụọgụ dị elu nke 0,75 (Hyper-NA EUV) rụọ ọrụ. Ndị nnọchianya Imec na-ekwu na n'ime afọ iri na-abịanụ, lithography agaghị ahapụ iji lasers na silicon. Isi iyi: ASML
isi: 3dnews.ru