Ọ gaghị ekwe omume iche n'echiche mmepe nke microelectronics na-enweghị imeziwanye teknụzụ mmepụta semiconductor. Iji gbasaa oke ma mụta ka esi emepụta ihe ndị dị ntakịrị na kristal, teknụzụ ọhụrụ na ngwaọrụ ọhụrụ dị mkpa. Otu n'ime teknụzụ ndị a nwere ike ịbụ mmepe mmepe nke ndị sayensị America.
Otu ndị nyocha sitere na ụlọ nyocha nke Argonne National Department of Energy Usoro ọhụrụ maka ịmepụta na etching ihe nkiri dị mkpa n'elu kristal. Nke a nwere ike iduga n'ichepụta ibe n'ogo dị nta karịa taa na n'ọdịnihu dị nso. E bipụtara ọmụmụ ihe ahụ n'akwụkwọ akụkọ Chemistry of Materials.
Usoro a tụrụ aro yiri usoro ọdịnala na etching, naanị kama ihe nkiri inorganic, nkà na ụzụ ọhụrụ na-emepụta ma na-arụ ọrụ na ihe nkiri organic. N'ezie, site na ntụnyere, a na-akpọ nkà na ụzụ ọhụrụ ahụ nkwụnye ego nke oyi akwa molecular (MLD, molecular Layer deposition) na molecular Layer etching (MLE, molecular Layer etching).
Dị ka ọ dị n'ihe gbasara etching oyi akwa atomic, usoro MLE na-eji ọgwụgwọ gas n'ime ụlọ dị n'elu kristal nwere ihe nkiri nke ihe sitere na organic. A na-eji gas abụọ dị iche iche na-agwọ kristal ahụ na cyclally ruo mgbe a na-eme ka ihe nkiri ahụ dị ntakịrị ka ọ bụrụ oke.
Usoro kemịkalụ dị n'okpuru iwu nke nhazi onwe onye. Nke a pụtara na oyi akwa mgbe oyi akwa wepụrụ even na a na-achịkwa n'ụzọ. Ọ bụrụ na ị na-eji fotomasks, ị nwere ike imepụtaghachi topology nke mgbawa ga-eme n'ọdịnihu na mgbawa ahụ wee tinye ya na nhazi kachasị elu.
N'ime nnwale ahụ, ndị ọkà mmụta sayensị jiri gas nwere nnu lithium na gas dabere na trimethylaluminum maka etching molecular. N'oge usoro etching, ogige lithium na-emeghachi omume na elu nke ihe nkiri alucone nke mere na a na-etinye lithium n'elu ma bibie njikọ kemịkal dị na fim ahụ. Mgbe ahụ, a na-enye trimethylaluminom, nke wepụrụ oyi akwa nke ihe nkiri na lithium, na otu otu ruo mgbe ihe nkiri ahụ na-ebelata ka ọ dị mkpa. Ezigbo njikwa nke usoro ahụ, ndị ọkà mmụta sayensị kwenyere, nwere ike ikwe ka nkà na ụzụ na-emepụta ihe na-emepụta mmepụta nke semiconductor.
isi: 3dnews.ru