Ukadaulo watsopano wopanga ma nanometer semiconductors wapangidwa ku USA

Ndikosatheka kulingalira kukulirakulira kwa ma microelectronics popanda kukonza ukadaulo wopanga semiconductor. Kuti muwonjezere malire ndikuphunzira momwe mungapangire zinthu zing'onozing'ono pamakristasi, matekinoloje atsopano ndi zida zatsopano zimafunikira. Chimodzi mwa matekinoloje awa chikhoza kukhala chitukuko chopambana cha asayansi aku America.

Gulu la ofufuza ochokera ku US Department of Energy's Argonne National Laboratory yakula njira yatsopano yopangira ndi kujambula mafilimu owonda pamwamba pa makhiristo. Izi zitha kupangitsa kupanga tchipisi pamlingo wocheperako kuposa lero komanso posachedwa. Kafukufukuyu adasindikizidwa mu nyuzipepala ya Chemistry of Materials.

Njira yomwe ikufunsidwa ikufanana ndi njira yachikhalidwe kuyika kwa atomiki ndi etching, kokha m'malo mafilimu inorganic, luso latsopano amalenga ndi ntchito ndi mafilimu organic. Kwenikweni, mofananiza, ukadaulo watsopanowu umatchedwa molecular layer deposition (MLD, molecular layer deposition) ndi molecular layer etching (MLE, molecular layer etching).

Monga momwe zimakhalira ndi ma atomiki osanjikiza, njira ya MLE imagwiritsa ntchito chithandizo cha gasi m'chipinda chapamwamba cha kristalo chokhala ndi mafilimu azinthu zopangidwa ndi organic. Krustaloyo imayendetsedwa mozungulira ndi mipweya iwiri yosiyana mosinthana mpaka filimuyo imachepetsedwa kukhala makulidwe operekedwa.

Njira zama Chemical zimatengera malamulo odzilamulira okha. Izi zikutanthauza kuti wosanjikiza pambuyo wosanjikiza amachotsedwa mofanana komanso mwadongosolo. Ngati mugwiritsa ntchito ma photomasks, mutha kutulutsanso topology ya chip chamtsogolo pa chip ndikuyika mapangidwewo molondola kwambiri.

Pakuyesaku, asayansi adagwiritsa ntchito mpweya wokhala ndi mchere wa lithiamu ndi gasi wozikidwa pa trimethylaluminium pakupanga maselo. Pa ndondomeko etching, ndi lifiyamu pawiri anachita ndi pamwamba pa alucone filimu m'njira kuti lithiamu waikamo pamwamba ndi kuwononga chomangira mankhwala mu filimu. Ndiye trimethylaluminium inaperekedwa, yomwe inachotsa filimuyo ndi lithiamu, ndi zina zotero mpaka filimuyo idachepetsedwa kukhala makulidwe omwe ankafuna. Kuwongolera kwabwino kwa njirayi, asayansi akukhulupirira, kumatha kulola ukadaulo womwe ukufunsidwa kuti ukankhire chitukuko cha semiconductor kupanga.

Source: 3dnews.ru