Sekureva kweiyo IEEE Spectrum webhusaiti, kubva mukupera kwaKukadzi kusvika kutanga kwaKurume, marabhoritari yakagadzirwa pahwaro hweBelgian centre Imec pamwe nekambani yeAmerica KMLabs yekudzidza matambudziko ne semiconductor photolithography pasi pesimba reEUV radiation (mune ultra-hard. ultraviolet range). Zvingaita sekuti, chii chiripo kudzidza? Aiwa, pane chidzidzo chekudzidza, asi sei tanga rabhoritari itsva yeizvi? Samsung yakatanga kugadzira 7nm machipisi hafu yegore rapfuura nechikamu chekushandisa EUV renji scanner. TSMC ichabatana munguva pfupi. Pakupera kwegore, vese vari vaviri vachatanga kugadzirwa kwengozi ne5 nm zviyero, zvichingodaro. Uye zvakadaro kune matambudziko, uye akakomba zvakakwana kutsvaga mhinduro dzemibvunzo mumarabhoritari, uye kwete mukugadzira.
Dambudziko guru muEUV lithography nhasi rinoramba riri mhando yephotoresist. Kunobva EUV radiation iplasma, kwete laser, sezvazvakaita kune yekare 193nm scanners. Laser inonyungudutsa donhwe remutobvu munzvimbo ine gasi uye mwaranzi inozobuda inoburitsa mafotoni ane simba rakapetwa ka14 kupfuura simba remaphoton muma scanner ane ultraviolet mwaranzi. Nekuda kweizvozvo, iyo photoresist inoparadzwa kwete chete munzvimbo dziya dzinoputirwa nemafotoni, asiwo zvikanganiso zvisina kujairika zvinoitika, kusanganisira nekuda kweinonzi fractional noise effect. Simba remaphoton rakawandisa. Kuedza neEUV scanner kunoratidza kuti mafotoresist, ayo achiri kukwanisa kushanda ne7 nm zviyero, anoratidza yakanyanyisa mwero wekuramba kana akagadzirwa mu5 nm maseketi. Dambudziko rakakomba zvekuti nyanzvi zhinji havatendi mukutanga kwakabudirira kuvhurwa kwe5nm process tekinoroji, tisingataure nezve shanduko kuenda ku3nm uye pazasi.
Dambudziko rekugadzira chizvarwa chitsva photoresist richagadziriswa murabhoritari yakabatana yeImec neKMLabs. Uye ivo vachazvigadzirisa kubva pakuona kwesainzi nzira, uye kwete nekusarudza reagents, sezvakaitwa mumakore makumi matatu apfuura. Kuti uite izvi, vanobatana nesainzi vanogadzira chishandiso chekuongorora kwakadzama kwemaitiro emuviri nemakemikari mune photoresist. Kazhinji, masynchrotrons anoshandiswa kudzidza maitiro pachikamu chemorekuru, asi Imec neKMLabs vari kuzogadzira fungidziro uye kuyerwa kweEUV ββmichina yakavakirwa pane infrared lasers. KMLabs ingori nyanzvi mune laser masisitimu.
Zvichienderana neKMLabs laser nzvimbo, chikuva chekugadzira yakakwira harmonics ichagadzirwa. Kazhinji, nekuda kweizvi, yakakwira-yakasimba laser pulse inotungamirwa mune gaseous svikiro, umo yakanyanya kuwanda frequency harmonics yeinotungamirwa pulse inoitika. Nekutendeuka kwakadaro, kurasikirwa kwesimba kwakakosha kunoitika, kuitira kuti musimboti wakafanana wekugadzira EUV mwaranzi haugone kushandiswa zvakananga semiconductor lithography. Asi izvi zvakakwana pakuedza. Chinonyanya kukosha ndechekuti mwaranzi inokonzeresa inogona kudzorwa zvese nekupuruzira nguva kubva picoseconds (10-12) kusvika attoseconds (10-18), uye newavelength kubva pa6,5 nm kusvika 47 nm. Pamudziyo wokuyeresa, aya ndiwo hunhu hunokosha. Ivo vanozobatsira kudzidza maitiro eiyo Ultrafast molecular shanduko mune photoresist, ionization maitiro uye kuratidzwa kune yakakwira simba mafotoni. Pasina izvi, maindasitiri photolithography ane zviyero zvisingasviki 3 uye kunyange 5 nm inoramba iri mubvunzo.
Source: 3dnews.ru