MaFrench akapa manomwe-level GAA transistor yamangwana

Kwenguva refu kwete chakavanzika, kuti kubva ku3nm process tekinoroji, ma transistors anozosimuka kubva payakamira "fin" FinFET chiteshi kuenda kune yakachinjika nanopage nzira dzakakomberedzwa nemasuwo kana GAA (gedhi-rese-kutenderera). Nhasi, iyo French Institute CEA-Leti yakaratidza nzira yekugadzira FinFET transistor maitiro anogona kushandiswa kugadzira akawanda-level GAA transistors. Uye kuchengetedza kuenderera kwehunyanzvi maitiro ndiyo hwaro hwakavimbika hwekuchinja nekukurumidza.

CEA-Leti nyanzvi dzeVLSI Technology & Circuits 2020 symposium vakagadzira mushumo nezve kugadzirwa kweanomwe-level GAA transistor (yakanyanya kutenda kune iyo coronavirus denda, nekuda kwekuti magwaro emharidzo akazotanga kuoneka nekukasira, uye kwete mwedzi mushure memusangano). Vatsvagiri veFrance vakaratidza kuti vanogona kugadzira GAA transistors ine chiteshi muchimiro che "stack" yese ye nanopages vachishandisa tekinoroji inoshandiswa zvakanyanya yeiyo inonzi RMG process (kutsiva simbi gedhi kana, muchiRussia, inotsiva (yenguva pfupi) simbi. gedhi). Pane imwe nguva, iyo RMG tekinoroji process yakagadziridzwa kugadzirwa kweFinFET transistors uye, sezvatinoona, inogona kuwedzerwa kusvika pakugadzirwa kweGAA transistors neakawanda-level kurongeka kwenanopage chiteshi.

Samsung, sekuziva kwedu, nekutanga kwekugadzirwa kwe3-nm chips, inoronga kugadzira maviri-level GAA transistors ane maviri flat chiteshi (nanopages) iri pamusoro peimwe, yakakomberedzwa nemativi ese gedhi. CEA-Leti nyanzvi dzakaratidza kuti zvinokwanisika kugadzira transistors nemanomwe nanopage migero uye panguva imwechete isa migero kuhupamhi hunodiwa. Semuenzaniso, yekuedza GAA transistor ine migero minomwe yakaburitswa mushanduro nehupamhi kubva pa15 nm kusvika 85 nm. Zviri pachena kuti izvi zvinokutendera kuti uise chaiwo maitiro e transistors uye unovimbisa kudzokorora kwavo (kuderedza kupararira kweparameter).

Sekureva kweFrench, iyo yakawanda chiteshi nhanho muGAA transistor, iyo yakakura hupamhi hunobudirira hweiyo chiteshi chese uye, saka, iko kudzoreka kuri nani kweiyo transistor. Zvakare, mune multilayer chimiro pane kushoma kuvuza ikozvino. Semuyenzaniso, nomwe-level GAA transistor ine katatu yakaderera leakage ikozvino pane maviri-level imwe (zvishoma, seSamsung GAA). Zvakanaka, iyo indasitiri yakazowana nzira yekukwira, ichifamba kubva pakuiswa kwakachinjika kwezvinhu pane chip kuenda kune yakatwasuka. Zvinoita sekuti ma microcircuits haafanire kuwedzera nzvimbo yemakristasi kuitira kuti atonyanya kukurumidza, ane simba uye ane simba.

Source: 3dnews.ru