Izvo hazvigoneke kufungidzira kumwe kuvandudzwa kwemakroelectronics pasina kuvandudza semiconductor tekinoroji yekugadzira. Kuwedzera miganhu uye kudzidza kugadzira zvidiki zvidiki pamakristasi, matekinoroji matsva uye zvishandiso zvitsva zvinodiwa. Imwe yeaya matekinoroji inogona kunge iri budiriro yekuvandudza nemasayendisiti eAmerica.
Chikwata chevaongorori kubva kuUS Department of Energy's Argonne National Laboratory hunyanzvi hutsva hwekugadzira uye kuisa mafirimu matete pamusoro pemakristasi. Izvi zvinogona kutungamira mukugadzirwa kwemachipisi padiki padiki pane nhasi uye munguva pfupi iri kutevera. Chidzidzo chacho chakabudiswa mumagazini Chemistry of Materials.
Nzira yakarongwa inofanana nemaitiro echinyakare uye etching, chete panzvimbo yemafirimu inorganic, tekinoroji nyowani inogadzira uye inoshanda nemafirimu ehupenyu. Chaizvoizvo, nekuenzanisa, tekinoroji nyowani inonzi molecular layer deposition (MLD, molecular layer deposition) uye molecular layer etching (MLE, molecular layer etching).
Senyaya yeatomic layer etching, nzira yeMLE inoshandisa kurapwa kwegasi mukamuri repamusoro pekristaro ine mafirimu eiyo organic-based material. Iyo crystal inobatwa cyclically nemagasi maviri akasiyana achichinjana kusvika iyo firimu yakatetepa kune yakapihwa ukobvu.
Makemikari maitiro ari pasi pemitemo yekuzvitonga. Izvi zvinoreva kuti layer after layer inobviswa zvakaenzana uye nenzira inodzorwa. Kana iwe ukashandisa mafotomasks, iwe unogona kuburitsa iyo topology yeramangwana chip pane chip uye etch dhizaini nekunyatso kwepamusoro.
Mukuyedza, masayendisiti akashandisa gasi rine lithium munyu uye gasi rakavakirwa patrimethylaluminium yekuisa ma molecular etching. Munguva ye etching process, iyo lithium compound yakabata nepamusoro pealucone firimu nenzira yekuti lithium yakaiswa pamusoro uye yakaparadza kemikari chisungo mufirimu. Zvadaro trimethylaluminium yakapiwa, iyo yakabvisa chidimbu chemufirimu ne lithiamu, uye zvichingodaro imwe neimwe kusvikira firimu yakaderedzwa kusvika kune yaidiwa. Kudzora kwakanaka kwemaitiro, masayendisiti anotenda, anogona kubvumira tekinoroji yakatsanangurwa kusundidzira kusimudzira kwekugadzirwa kwesemiconductor.
Source: 3dnews.ru