Theknoloji e ncha ea tlhahiso ea li-semiconductors tsa nanometer e entsoe USA

Ha ho khonehe ho nahana ka nts'etsopele e tsoelang pele ea li-microelectronics ntle le ho ntlafatsa mahlale a tlhahiso ea semiconductor. Ho holisa meeli le ho ithuta ho hlahisa likarolo tse nyane ho likristale, ho hlokahala mahlale a macha le lisebelisoa tse ncha. E 'ngoe ea mahlale ana e ka ba tsoelo-pele e entsoeng ke bo-ramahlale ba Amerika.

Sehlopha sa bafuputsi ho tsoa Lefapheng la US la Eneji la Argonne National Laboratory ntshetswa pele mokhoa o mocha oa ho theha le ho kenya lifilimi tse tšesaane holim'a likristale. Sena se ka lebisa tlhahisong ea li-chips ka tekanyo e nyane ho feta kajeno le haufinyane. Thuto e ile ea hatisoa koranteng ea Chemistry of Materials.

Thekniki e sisintsweng e tshwana le ya setso ho beha lera la athomo le etching, feela sebakeng sa lifilimi tse inorganic, thekenoloji e ncha e theha le ho sebetsa le lifilimi tsa manyolo. Haele hantle, ka papiso, theknoloji e ncha e bitsoa molecular layer deposition (MLD, molecular layer deposition) le molecular layer etching (MLE, molecular layer etching).

Joalo ka tabeng ea etching ea lera la athomo, mokhoa oa MLE o sebelisa phekolo ea khase ka kamoreng e holim'a kristale e nang le lifilimi tsa lintho tse entsoeng ka manyolo. Kristale e tšoaroa ka cyclically ka likhase tse peli tse fapaneng ka ho fapanyetsana ho fihlela filimi e tšesaane ho isa botenya bo fanoeng.

Mekhoa ea lik'hemik'hale e tlas'a melao ea ho itaola. Sena se bolela hore lera ka mor'a lera le tlosoa ka ho lekana le ka mokhoa o laoloang. Haeba u sebelisa li-photomasks, u ka hlahisa topology ea chip ea nakong e tlang ho chip 'me u tšoaea moralo ka ho nepahala ho fetisisa.

Tekong, bo-rasaense ba sebelisitse khase e nang le letsoai la lithium le khase e thehiloeng ho trimethylaluminium bakeng sa etching ea molek'hule. Nakong ea ts'ebetso ea etching, motsoako oa lithium o ile oa itšoara ka holim'a filimi ea alucone ka tsela eo lithium e neng e kenngoa holim'a metsi 'me ea senya lik'hemik'hale tsa lik'hemik'hale filiming eo. Joale ho ile ha fanoa ka trimethylaluminium, e ileng ea tlosa lera la filimi ka lithium, 'me joalo-joalo ka bonngoe ho fihlela filimi e fokotsoa ho botenya bo lakatsehang. Taolo e ntle ea ts'ebetso, bo-rasaense ba lumela, e ka lumella theknoloji e reriloeng ho sutumelletsa nts'etsopele ea tlhahiso ea semiconductor.

Source: 3dnews.ru