ืฆืืจืืง ืืื, ASML, ืึท ืคืืจืขืจ ืืื ืื ืืืืืึธืืจืึทืคื ืกืงืึทื ื ืขืจ ืึธืคึผืฉื ืื, ืืขืจืขืื ืืืขืื ืื ืคึผืจืึทืกืคึผืขืงืก ืคึฟืึทืจ ืื ืืืขืจืืืฉืึทื ืก ืืื ืื ืึธื ืืืื ืคืื ืื ืืืืึทืืขืจ ืืึธืจืฆืขื ืืืื ื ืคืื ืกืืกืืขืืขื ืืืึธืก ืืึธืื ืืจืืขืื ืืื ืึท ืืื ืืขืจ-ืืืื ื ืืืขืจืืงืึทื ืขืคืขื ืื ื ืืืขืจื ืคืื 0,75 (Hyper-NA EUV). ืืืขืง ืคืืจืฉืืืืขืจืก ืคืึธืืขืจื ืึทื ืืื ืื ืืืืึทืืขืจ ืืึธืจืฆืขื ืืืื ื, ืืืืืึธืืจืึทืคื ืืืขื ื ืืฉื ืจืืจื ืึทืืืขืง ืคืื ืื ื ืืฆื ืคืื ืืืืืขืจื ืืื ืกืืืืฆืืื. ืืืื ืืงืืจ: ASML
ืืงืืจ: 3dnews.ru