Akunakwenzeka ukucabanga ngokuthuthukiswa okuqhubekayo kwama-microelectronics ngaphandle kokuthuthukisa ubuchwepheshe bokukhiqiza be-semiconductor. Ukuze unwebe imingcele nokufunda indlela yokukhiqiza ama-elementi amancane kumakristalu, kudingeka ubuchwepheshe obusha namathuluzi amasha. Obunye balobu buchwepheshe bungaba intuthuko eyimpumelelo yososayensi baseMelika.
Ithimba labacwaningi abavela ku-Argonne National Laboratory yoMnyango Wezamandla wase-US indlela entsha yokudala nokushumeka amafilimu amancanyana ebusweni bamakristalu. Lokhu kungase kuholele ekukhiqizweni kwama-chips ngesilinganiso esincane kunanamuhla nasesikhathini esizayo esiseduze. Ucwaningo lushicilelwe kumagazini i-Chemistry of Materials.
Inqubo ehlongozwayo ifana nenqubo yendabuko kanye ne-etching, esikhundleni samafilimu angaphili, ubuchwepheshe obusha budala futhi busebenze namafilimu ezinto eziphilayo. Empeleni, ngokufanisa, ubuchwepheshe obusha bubizwa ngokuthi i-molecular layer deposition (MLD, i-molecular layer deposition) kanye ne-molecular layer etching (MLE, i-molecular layer etching).
Njengasendabeni yokushumeka kongqimba lwe-athomu, indlela ye-MLE isebenzisa ukwelashwa kwegesi egumbini elingaphezulu kwekristalu elinamafilimu ezinto eziphilayo. Ikristalu iphathwa ngomjikelezo ngamagesi amabili ahlukene ngokushintshana kuze kube yilapho ifilimu incishiswa ibe ugqinsi olunikeziwe.
Izinqubo zamakhemikhali zingaphansi kwemithetho yokuzilawula. Lokhu kusho ukuthi ungqimba emva kongqimba lususwa ngokulinganayo nangendlela elawulwayo. Uma usebenzisa ama-photomasks, ungakwazi ukukhiqiza kabusha i-topology ye-chip yesikhathi esizayo ku-chip futhi unamathisele umklamo ngokunemba okuphezulu kakhulu.
Ocwaningweni, ososayensi basebenzise igesi equkethe usawoti we-lithium kanye negesi esuselwe ku-trimethylaluminium ukuze kufakwe amangqamuzana. Ngesikhathi senqubo yokuqopha, inhlanganisela ye-lithium yasabela ngobuso befilimu ye-alucone ngendlela yokuthi i-lithium yafakwa phezulu futhi yabhubhisa isibopho samakhemikhali efilimu. Khona-ke i-trimethylaluminium yanikezwa, eyasusa ungqimba lwefilimu nge-lithium, njalonjalo ngayinye kuze kube yilapho ifilimu incishiswa ekugqineni oyifunayo. Ukulawulwa okuhle kwenqubo, ososayensi bakholelwa ukuthi, kungavumela ubuchwepheshe obuhlongozwayo ukuthi buqhube ukuthuthukiswa kokukhiqizwa kwe-semiconductor.
Source: 3dnews.ru